CMUTs with high-K atomic layer deposition dielectric...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2014 / 12 Vol. 61; Iss. 12

CMUTs with high-K atomic layer deposition dielectric material insulation layer

Xu, Toby, Tekes, Coskun, Degertekin, F.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
61
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/TUFFC.2014.006481
Date:
December, 2014
File:
PDF, 4.92 MB
english, 2014
Conversion to is in progress
Conversion to is failed