![](/img/cover-not-exists.png)
Ammonium Dodecyl Sulfate as a Potential Corrosion Inhibitor Surfactant for Electrochemical Mechanical Planarization of Copper
Hong, Y., Roy, D., Babu, S. V.Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2042618
File:
PDF, 412 KB
english, 2005