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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Pulsed MO CVD Processes of MgO Layer Deposition from Mg(thd)
Kuchumov, Boris M., Shevtsov, Yuriy V., Semyannikov, Pyotr P., Filatov, Egor S., Igumenov, Igor K.Year:
2009
Language:
english
DOI:
10.1149/1.3207688
File:
PDF, 343 KB
english, 2009