Backside versus frontside advanced chemical analysis of...

Journal of Electron Spectroscopy and Related Phenomena 2015 / 08 Vol. 203

Backside versus frontside advanced chemical analysis of high-k/metal gate stacks

Martinez, E., Saidi, B., Veillerot, M., Caubet, P., Fabbri, J-M., Piallat, F., Gassilloud, R., Schamm-Chardon, S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
203
Language:
english
Journal:
Journal of Electron Spectroscopy and Related Phenomena
DOI:
10.1016/j.elspec.2015.04.022
Date:
August, 2015
File:
PDF, 2.13 MB
english, 2015
Conversion to is in progress
Conversion to is failed