Growth Rate Effect on 3C-SiC Film Residual Stress on (100) Si Substrates
Anzalone, Ruggero, Locke, Christopher, Carballo, J., Piluso, Nicolò, Severino, Andrea, D'Arrigo, Giuseppe, Volinsky, A.A., La Via, Francesco, Saddow, Stephen E.Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.143
Date:
April, 2010
File:
PDF, 316 KB
english, 2010