A Study of Structural Defects in Sputtered ZrN Films

Materials Science Forum 1992 Vol. 105-110

A Study of Structural Defects in Sputtered ZrN Films

Brunner, J., Perry, Anthony J., Schaffer, J.P., Sproul, W.D.
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Volume:
105-110
Year:
1992
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.105-110.913
File:
PDF, 287 KB
1992
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