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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Computational simulation of microfluidics, electrokinetics, and particle transport in biological MEMS devices
Giridharan, M. G., Krishnamoorthy, Soumya, Krishnan, Anantha, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341184
File:
PDF, 1.83 MB
english, 1999