TiW/TiWN/Pt Ohmic Contacts to n-Type 3C-SiC

TiW/TiWN/Pt Ohmic Contacts to n-Type 3C-SiC

Hofeling, Kirk, Rieth, Loren, Solzbacher, Florian
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Volume:
911
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0911-B11-06
Date:
January, 2006
File:
PDF, 315 KB
english, 2006
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