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Deposition and Plasma Measurements of Zr-Oxide Films with Low Impurity Concentrations by Remote PEALD
Kim, Ju Youn, Kim, Seok Hoon, Seo, Hyungtak, Kim, Jung-Hyung, Jeon, HyeongtagVolume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1854773
File:
PDF, 349 KB
english, 2005