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ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Dopant Transport in Tungsten Silicide Buried Layers for Application in SSOI
Liao, Shengzhou, Bain, Michael, Baine, Paul, Montgomery, John, McNeill, David W., Armstrong, Brian M., Gamble, HaroldYear:
2010
Language:
english
DOI:
10.1149/1.3375619
File:
PDF, 530 KB
english, 2010