SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Nanometrology of microsystems: traceability problem in nanometrology
Iordache, Iuliana, Apostol, D., Iancu, O., Stanciu, G., Logofatu, P. C., Damian, V., Garoi, F., Savu, B., Bojan, M., Iancu, Ovidiu, Manea, Adrian, Schiopu, PaulYear:
2012
Language:
english
DOI:
10.1117/12.741833
File:
PDF, 1.57 MB
english, 2012