High-Resolution XRD Investigations of the Strain Reduction...

Materials Science Forum 2003 Vol. 433-436

High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates

Weih, Petia, Cimalla, Volker, Förster, Christian, Pezoldt, Jörg, Stauden, Thomas, Spieß, Lothar, Romanus, Henry, Eickhoff, M., Hermann, M., Masri, Pierre M., Ambacher, Oliver
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.233
File:
PDF, 233 KB
english, 2003
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