Study on Reactive Species in Catalyst-Referred Etching of...

Materials Science Forum 2013 / 1 Vol. 740-742

Study on Reactive Species in Catalyst-Referred Etching of 4H–SiC using Platinum and Hydrofluoric Acid

Isohahsi, Ai, Sano, Yasushi, Okamoto, Takeshi, Tachibana, Kazuma, Arima, Kenta, Inagaki, Kouji, Yagi, Keita, Sadakuni, Shun, Morikawa, Yoshitada, Yamauchi, Kazuto
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.847
Date:
January, 2013
File:
PDF, 318 KB
english, 2013
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