Reliability of Thin Thermally Grown SiO2 on 3C-SiC Studied...

Materials Science Forum 2010 / 4 Vol. 645-648

Reliability of Thin Thermally Grown SiO2 on 3C-SiC Studied by Scanning Probe Microscopy

Eriksson, Jens, Weng, Ming Hung, Roccaforte, Fabrizio, Giannazzo, Filippo, Fiorenza, Patrick, Lorenzzi, Jean, Ferro, Gabriel, Raineri, Vito
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.833
Date:
April, 2010
File:
PDF, 586 KB
english, 2010
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