A Study on Low Dielectric Material Deposition Using a...

A Study on Low Dielectric Material Deposition Using a Helicon Plasma Source

Kim, Jung-Hyung
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Volume:
143
Year:
1996
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837137
File:
PDF, 582 KB
english, 1996
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