Backside Analysis of Ultra-Thin Film Stacks in...

MRS Proceedings 2009 / 1 Vol. 1184

Backside Analysis of Ultra-Thin Film Stacks in Microelectronics Technology Using X-ray Photoelectron Spectroscopy

Hantschel, Thomas, Demeulemeester, Cindy, Suderie, Arnaud, Lacave, Thomas, Conard, Thierry, Vandervorst, Wilfried
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Volume:
1184
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1184-HH08-04
Date:
January, 2009
File:
PDF, 280 KB
english, 2009
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