Pore Seal Property of Ultra-thin Layer for Porous Low-k...

MRS Proceedings 2012 / 1 Vol. 1428

Pore Seal Property of Ultra-thin Layer for Porous Low-k Films revealed by Ellipsometric Porosimetry

Ono, Shoko Sugiyama, Kayaba, Yasuhisa, Suzuki, Tsuneji, Tanaka, Hirofumi, Kohmura, Kazuo
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1428
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.1354
Date:
January, 2012
File:
PDF, 370 KB
english, 2012
Conversion to is in progress
Conversion to is failed