Temperature-Programmed Desorption Study on the...

Journal of The Electrochemical Society 2001 Vol. 148; Iss. 9

Temperature-Programmed Desorption Study on the Decomposition Mechanism of Ti(OC[sub 3]H[sub 7])[sub 4] on Si(100)

Cho, Sung-Il, Chung, Chan-Hwa, Moon, Sang Heup
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Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1386628
File:
PDF, 107 KB
english, 2001
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