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The effect of substrate temperature on atomic layer deposited zinc tin oxide
Lindahl, Johan, Hägglund, Carl, Wätjen, J. Timo, Edoff, Marika, Törndahl, TobiasVolume:
586
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.04.029
Date:
July, 2015
File:
PDF, 1.36 MB
english, 2015