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Investigation of Femtosecond Laser Irradiation on Fused Silica Etching Selectivity
Bellouard, Yves, Said, Ali A., Dugan, Mark, Bado, PhilippeVolume:
850
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-850-MM5.1
Date:
January, 2004
File:
PDF, 3.33 MB
english, 2004