Optimization of Interlevel Dielectrics for Embedded...

Journal of The Electrochemical Society 2005 Vol. 152; Iss. 5

Optimization of Interlevel Dielectrics for Embedded Nonvolatile Deep Submicrometer Technologies

Cacciato, A., Dormans, D., Scarpa, A., Habaš, P., de Keijser, M., van de Ven, G.
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Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1887169
File:
PDF, 996 KB
english, 2005
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