Zeolite Low-k Film Properties Dependence on Nanocrystal...

MRS Proceedings 2006 / 1 Vol. 914

Zeolite Low-k Film Properties Dependence on Nanocrystal Size

Eslava-Fernandez, Salvador, Baklanov, M.R., Iacopi, F., S.H., Brongersma, Kirschhock, C.E.A., Maex, K.
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Volume:
914
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0914-F03-08
Date:
January, 2006
File:
PDF, 468 KB
english, 2006
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