[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Different Types of Degradation and Recovery Mechanisms on NBT Stress for Thin SIO2 Films by On-The-Fly Measurement
Teramoto, Akinobu, Kuroda, Rihito, Suko, Tomohiro, Sato, Masaki, Tsuboi, Takashi, Sugawa, Shigetoshi, Ohmi, TadahiroYear:
2009
Language:
english
DOI:
10.1149/1.3122100
File:
PDF, 813 KB
english, 2009