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Electrolyte Composition for Cu Electrochemical Mechanical Planarization
Tripathi, Abhinav, Burkhard, Craig, Suni, Ian Ivar, Li, Yuzhuo, Doniat, Francois, Barajas, Alex, McAndrew, JamesVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2980439
File:
PDF, 311 KB
english, 2008