[Nanostructure Science and Technology] Alternative Lithography || Step and Flash Imprint Lithography
Sotomayor Torres, Clivia M.Volume:
10.1007/97
Year:
2003
Language:
english
DOI:
10.1007/978-1-4419-9204-8_7
File:
PDF, 2.33 MB
english, 2003