[Microsystems] Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators Volume 14 || Basics for a Thermally Actuated Micromirror
Lammel, Gerhard, Schweizer, Sandra, Renaud, PhilippeVolume:
10.1007/97
Year:
2002
Language:
english
DOI:
10.1007/978-1-4757-6083-5_2
File:
PDF, 3.62 MB
english, 2002