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Growth and properties of hydrogenated microcrystalline silicon thin films prepared by magnetron sputtering with different substrate temperatures
Wang, Lin-Qing, Wang, Wei-Yan, Huang, Jin-Hua, Tan, Rui-Qin, Song, Wei-Jie, Chen, Jian-MinLanguage:
english
Journal:
Rare Metals
DOI:
10.1007/s12598-015-0510-9
Date:
May, 2015
File:
PDF, 2.65 MB
english, 2015