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Fabrication of through-hole membrane with anodic alumina nanohole array
Wang, Lei, Nagato, Keisuke, Iwasaki, Shiko, Hamaguchi, Tetsuya, Nakao, MasayukiVolume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.01.037
Date:
June, 2015
File:
PDF, 1.73 MB
english, 2015