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A Comparison of Xenon Plasma FIB Technology with Conventional Gallium LMIS FIB: Imaging, Milling, and Gas-Assisted Applications
Young, R, Rue, C, Randolph, S, Chandler, C, Franz, G, Schampers, R, Klumpp, A, Kwakman, LVolume:
17
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927611004132
Date:
July, 2011
File:
PDF, 721 KB
2011