A Comparison of Xenon Plasma FIB Technology with...

A Comparison of Xenon Plasma FIB Technology with Conventional Gallium LMIS FIB: Imaging, Milling, and Gas-Assisted Applications

Young, R, Rue, C, Randolph, S, Chandler, C, Franz, G, Schampers, R, Klumpp, A, Kwakman, L
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Volume:
17
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927611004132
Date:
July, 2011
File:
PDF, 721 KB
2011
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