Elimination of Carbon Contamination from Silicon Kerf Using...

Industrial & Engineering Chemistry Research 2015 / 06 Vol. 54; Iss. 22

Elimination of Carbon Contamination from Silicon Kerf Using a Furnace Aerosol Reactor Methodology

Vazquez-Pufleau, Miguel, Chadha, Tandeep S., Yablonsky, Gregory, Erk, Henry F., Biswas, Pratim
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Volume:
54
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/acs.iecr.5b00577
Date:
June, 2015
File:
PDF, 2.80 MB
english, 2015
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