Beyond EUV lithography: a comparative study of efficient photoresists' performance
Mojarad, Nassir, Gobrecht, Jens, Ekinci, YasinVolume:
5
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep09235
Date:
March, 2015
File:
PDF, 1.23 MB
english, 2015