![](/img/cover-not-exists.png)
Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: towards environmental health and safety assessments
Speed, David, Westerhoff, Paul, Sierra-Alvarez, Reyes, Draper, Rockford, Pantano, Paul, Aravamudhan, Shyam, Chen, Kai Loon, Hristovski, Kiril, Herckes, Pierre, Bi, Xiangyu, Yang, Yu, Zeng, Chao, OteroVolume:
2
Year:
2015
Language:
english
Journal:
Environ. Sci.: Nano
DOI:
10.1039/c5en00046g
File:
PDF, 4.25 MB
english, 2015