Sensitivity analysis of scanning microwave microscopy for nano-scale dopant measurements in Si
Torigoe, Kazuhisa, Arita, Makoto, Motooka, TeruakiVolume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4765730
File:
PDF, 2.63 MB
english, 2012