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Electrical and optical properties of Ta-Si-N thin films deposited by reactive magnetron sputtering
Oezer, D., Ramírez, G., Rodil, S. E., Sanjinés, R.Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4766904
File:
PDF, 2.69 MB
english, 2012