Scheduling of multiple in-line steppers for semiconductor...

International Journal of Systems Science 2014 / 03 Vol. 45; Iss. 3

Scheduling of multiple in-line steppers for semiconductor wafer fabs

Chiou, Chie-Wun, Wu, Muh-Cherng
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Volume:
45
Language:
english
Journal:
International Journal of Systems Science
DOI:
10.1080/00207721.2012.724093
Date:
March, 2014
File:
PDF, 358 KB
english, 2014
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