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COMPARATIVE ANALYSIS FOR THE LOCAL PIEZOELECTRIC PROPERTIES OF ION BEAM AND REACTIVE ION BEAM ETCHED Pb(Zr,Ti)O 3 THIN FILMS
Blach-Legrand, C., Saitzek, S., Da Costa, A., Desfeux, R., Soyer, C., Rémiens, D.Volume:
98
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580802096614
Date:
June, 2008
File:
PDF, 2.34 MB
english, 2008