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Design and Development of MEMS Capacitive Large-Scale Strain Sensors
Duan, Chengli, Jiang, Yadong, Chen, Lijie, Tai, Huiling, He, YingfeiVolume:
147
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2013.792226
Date:
January, 2013
File:
PDF, 364 KB
english, 2013