Electrical Properties of Dielectric and Ferroelectric Films...

Integrated Ferroelectrics 2002 / 01 Vol. 46; Iss. 1

Electrical Properties of Dielectric and Ferroelectric Films Prepared by Plasma Enhanced Atomic Layer Deposition

Lee, Won-Jae, Shin, Woong-Chul, Chae, Byung-Gyu, Ryu, Sang-Ouk, You, In-Kyu, Cho, Seong Mok, Yu, Byoung-Gon, Shin, Byoung-Chul
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Volume:
46
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/713718252
Date:
January, 2002
File:
PDF, 455 KB
english, 2002
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