Molecular dynamics simulation of silicon oxidation enhanced...

Journal of Physics D Applied Physics 2015 / 04 Vol. 48; Iss. 15

Molecular dynamics simulation of silicon oxidation enhanced by energetic hydrogen ion irradiation

Mizotani, Kohei, Isobe, Michiro, Fukasawa, Masanaga, Nagahata, Kazunori, Tatsumi, Tetsuya, Hamaguchi, Satoshi
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Volume:
48
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/48/15/152002
Date:
April, 2015
File:
PDF, 348 KB
english, 2015
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