Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy Photoresist
Tuomikoski, Santeri, Franssila, SamiVolume:
T114
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2004/t114/056
Date:
January, 2004
File:
PDF, 525 KB
english, 2004