Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy...

Wafer-Level Bonding of MEMS Structures with SU-8 Epoxy Photoresist

Tuomikoski, Santeri, Franssila, Sami
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Volume:
T114
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2004/t114/056
Date:
January, 2004
File:
PDF, 525 KB
english, 2004
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