Compositional and Structural Properties of TiO...

Chinese Physics Letters 2006 / 03 Vol. 23; Iss. 3

Compositional and Structural Properties of TiO 2− x N x Thin Films Deposited by Radio-Frequency Magnetron Sputtering

Shi-Wei, Jing, Yi-Chun, Liu, Yu, Liang, Jian-Gang, Ma, You-Ming, Lu, De-Zhen, Shen, Ji-Ying, Zhang, Xi-Wu, Fan, Ri-Xiang, Mu
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Volume:
23
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307x/23/3/044
Date:
March, 2006
File:
PDF, 659 KB
english, 2006
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