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Development and Characterization of Metal-Insulator-Metal Capacitors with SiN x Thin Films by Plasma-Enhanced Chemical Vapor Deposition
Cong, Wang, Fang, Zhang, Nam-Young, KimVolume:
27
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307x/27/7/078101
Date:
July, 2010
File:
PDF, 312 KB
english, 2010