Charge Loss Characteristics of Different Al Contents in a HfAlO Trapping Layer Investigated by Variable Temperature Kelvin Probe Force Microscopy
Zhang, Dong, Huo, Zong-Liang, Jin, Lei, Han, Yu-Long, Chu, Yu-Qiong, Chen, Guo-Xing, Liu, Ming, Yang, Bao-HeVolume:
31
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307x/31/6/067701
Date:
June, 2014
File:
PDF, 1.29 MB
english, 2014