Gadolinium scandate by high-pressure sputtering for future generations of high-κ dielectrics
Feijoo, P C, Pampillón, M A, San Andrés, E, Fierro, J L GVolume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/8/085004
Date:
August, 2013
File:
PDF, 1.19 MB
english, 2013