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Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
Jayaraman, Balaji, Singh, Vijay Raj, Asundi, Anand, Bhat, Navakanta, Hegde, Gopalkrishna MVolume:
21
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/21/1/015301
Date:
January, 2010
File:
PDF, 507 KB
english, 2010