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Investigation of the cantilever response of non-contact atomic force microscopy for topography measurements in all three dimensions
Häßler-Grohne, Wolfgang, Hüser, Dorothee, Dai, Gaoliang, Köning, Rainer, Bosse, HaraldVolume:
22
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/22/9/094006
Date:
September, 2011
File:
PDF, 2.35 MB
english, 2011