Aspect-ratio-dependent ultra-low reflection and...

Aspect-ratio-dependent ultra-low reflection and luminescence of dry-etched Si nanopillars on Si substrate

Pai, Yi-Hao, Meng, Fan-Shuen, Lin, Chun-Jung, Kuo, Hao-Chung, Hsu, Shih-Hsin, Chang, Yia-Chung, Lin, Gong-Ru
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Volume:
20
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/20/3/035303
Date:
January, 2009
File:
PDF, 1.63 MB
english, 2009
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