Submicron-patterning of bulk titanium by nanoimprint...

Nanotechnology 2012 / 02 Vol. 23; Iss. 6

Submicron-patterning of bulk titanium by nanoimprint lithography and reactive ion etching

Domanski, M, Luttge, R, Lamers, E, Walboomers, X F, Winnubst, L, Jansen, J A, Gardeniers, J G E
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Volume:
23
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/23/6/065306
Date:
February, 2012
File:
PDF, 1.59 MB
english, 2012
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