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Super-selective cryogenic etching for sub-10 nm features
Liu, Zuwei, Wu, Ying, Harteneck, Bruce, Olynick, DeirdreVolume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/1/015305
Date:
January, 2013
File:
PDF, 3.03 MB
english, 2013