Self-controlled fabrication of single-crystalline silicon nanobeams using conventional micromachining
Mehdizadeh, Emad, Rahafrooz, Amir, Pourkamali, SiavashVolume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/31/315303
Date:
August, 2014
File:
PDF, 1.67 MB
english, 2014