Self-controlled fabrication of single-crystalline silicon...

Self-controlled fabrication of single-crystalline silicon nanobeams using conventional micromachining

Mehdizadeh, Emad, Rahafrooz, Amir, Pourkamali, Siavash
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Volume:
25
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/25/31/315303
Date:
August, 2014
File:
PDF, 1.67 MB
english, 2014
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